Molecular ruler for scaling down nanostructures

Details Molecular ruler for scaling down nanostructures Molecular ruler for scaling down nanostructures

2006-03-21

2006-03-21

Smith, Matthew (Department: 2823)

Semiconductor device manufacturing: process

Having organic semiconductive component

C257S040000

Reexamination Certificate

active

07015062

ABSTRACT:
The present invention is a method and apparatus relating to manufacturing nanostructure patterns and components using molecular science. The method includes overlaying a multilayer organic molecule resist on at least a portion of a parent structure selectively deposited on a substrate, depositing a layer over the parent structure and in contact with at least a portion of the multilayer organic resist, and removing the multilayer organic molecule resist to leave a residual structure.

REFERENCES:
patent: 4745042 (1988-05-01), Sasago et al.
patent: 5589692 (1996-12-01), Reed
patent: 5627090 (1997-05-01), Marukawa et al.
patent: 6060327 (2000-05-01), Keen
patent: 6090933 (2000-07-01), Kayyem et al.
patent: 6131580 (2000-10-01), Ratner et al.
patent: 6231668 (2001-05-01), Loesch et al.
patent: 6232706 (2001-05-01), Dai et al.
patent: 2002/0190759 (2002-12-01), Tour et al.
patent: 2004/0110350 (2004-06-01), Pang et al.
Hoechst AG 1999 Derwent Information LTD 1976-32210X.
Shinji Matsui, Nanostructure Fabrication Using Electron Beam and Its application to Nanometer Devices (IEEE vol. 85, No. 4, Apr. 1997).
Hoechst AG, Aromatic amides of mercapto-alkanoic acids-used as adhesive agents for photo-polymerisable copying layers an copper emulsion carriers (1999 Derwent Information LTD 1976-32210X).
J. Am. Chem. Soc. 1991, 113, 5866-5868.
Advanced Materials—“Communications” “Engineering the Microfabrication of Layer-by-Layer Thin Films”, by Sarah L. Clark and Paul T. Hammond.

Affiliated with

Also associated with

Rating

Molecular ruler for scaling down nanostructures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Molecular ruler for scaling down nanostructures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Molecular ruler for scaling down nanostructures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3529101