Molecular pump and connecting device

Details Molecular pump and connecting device Molecular pump and connecting device

2004-08-24

2008-03-11

Verdier, Christopher (Department: 3745)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

C415S009000, C415S214100

Reexamination Certificate

active

07341423

ABSTRACT:
A flange of a molecular pump is connected to a vacuum vessel by first bolts that extend through elongate holes in the flange and are bolted to the vacuum vessel. One or more buffering members are attached to the flange by the first bolts that extend through first openings in the buffering members and by second bolts that extend through second openings in the buffering members and are bolted to the flange. In the event of malfunction of the molecular pump that generates an abnormally high torque, the buffering members plastically deform and absorb the shock energy caused by the abnormal torque thereby preventing damage to the vacuum vessel.

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patent: 8-114196 (1996-05-01), None
patent: 10-274189 (1998-10-01), None

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