Coherent light generators – Particular beam control device – Mode discrimination
Patent
1999-05-24
2000-11-28
Scott, Jr., Leon
Coherent light generators
Particular beam control device
Mode discrimination
372 57, 372 20, H01S 3098
Patent
active
061544701
ABSTRACT:
A molecular fluorine (F.sub.2) laser is provided wherein the gas mixture comprises molecular fluorine for generating a spectral emission including two or three closely spaced lines around 157 nm. An etalon provides line selection such that the output beam only includes one of these lines. The etalon may also serve to outcouple the beam and/or narrow the selected line. Alternatively, a prism provides the line selection and the etalon narrows the selected line. The etalon may be a resonator reflector which also selects a line, while another element outcouples the beam. The etalon plates, preferably uncoated, comprise a material that is transparent at 157 nm, such as CaF.sub.2, MgF.sub.2, LiF.sub.2, BaF.sub.2, SrF.sub.2, quartz and fluorine doped quartz. The etalon plates are separated by spacers comprising a material having a low thermal expansion constant, such as invar, zerodur.RTM., ultra low expansion glass, and quartz. A gas such as helium or a solid such as CaF.sub.2 that does not absorb radiation 157 nm fills the gap between the etalon plates, or the gap is evacuated. The gas mixture preferably further includes neon as a buffer gas. Another etalon may be used for line narrowing. One or more of a highly reflective mirror, a high finesse etalon or a prism with a highly reflective back surface may serve as a highly reflective resonator reflector. Any of one or more etalons, a prism, a brewster plate and a highly or partially reflective mirror may seal the laser discharge chamber.
REFERENCES:
patent: 3868592 (1975-02-01), Yarborough et al.
patent: 4393505 (1983-07-01), Fahlen
patent: 4696012 (1987-09-01), Harshaw
patent: 4829536 (1989-05-01), Kajiyama et al.
patent: 4856018 (1989-08-01), Nozue et al.
patent: 4975919 (1990-12-01), Amada et al.
patent: 4977563 (1990-12-01), Nakatani et al.
patent: 5081635 (1992-01-01), Wakabayashi et al.
patent: 5095492 (1992-03-01), Sandstrom
patent: 5150370 (1992-09-01), Furuya et al.
patent: 5404366 (1995-04-01), Wakabayashi et al.
patent: 5559816 (1996-09-01), Basting et al.
patent: 5646954 (1997-07-01), Das et al.
patent: 5684822 (1997-11-01), Partlo
patent: 5761236 (1998-06-01), Kleinschmidt et al.
patent: 5856991 (1999-01-01), Ershov
patent: 5901163 (1999-05-01), Ershov
patent: 6028879 (2000-02-01), Ershov
Optics and Laser Technology, vol. 11, No. 6, Dec. 1979, "CIF and F.sub.2 ; two new ultra-violet laser systems," K. Hola, M. Diegelmann, H. Pummer, K.L. Kompa, 6 pgs.
Applied Physics B Photo-physics and Laser Chemistry, vol. B55, No. 1, Jul. 1992, "Influence of Cavity Configuration on the Pulse Energy of a High-Pressure Molecular Fluorine Laser," S.M. Hooker, A.M. Haxell, and C.E. Webb, 6 pgs.
Highlights Lambdaphysik, Apr. 1993, "Excimer laser based microstructuring using mask projection techniques," U. Sarbach and H.J. Kahlert, 4 pgs.
"High-power efficient vacuum ultraviolet F.sub.2 laser excited by an electric discharge," V.N. Ishchenko, S.A. Kochubei, and A.M. Razhev, 3 pgs.
Conference on Lasers and Electro-optics, 1990 Technical Digest Series, vol. 7, May 21-25, 1990, Anaheim, Califorina, "Spectroscopic comparison between low and high pressure discharge pumped Xe atomic lasers," K. Komatsu, E. Matsui, S. Takahashi, Fumiko Kannari, M. Obara, 30 pgs.
Applied Physics Letters, vol. 56, Jun. 25, 1990, No. 26, "High specific output energy operation of a vacuum ultraviolet molecular fluorine laser excited at 66 MWcm ' by an electric discharge," Masayuki Kakehata, Etsu Hashimoto, Fumihiko Kannari and Minoru Obara, 6 pgs.
Journal of Applied Physics, vol. 50, Jun. 1979, No. 6, "Novel neutral atomic fluorine laser lines in a high-pressure mixture of F.sub.2 and He," Shin Sumida, Minoru Obara, and Tomoo Fujioka, 10 pgs.
IEEE Journal of Quantum Electronics, Nov. 1991, vol. 27, No. 11, "Efficiency Characterization of Vacuum Ultraviolet Molecular Fluorine (F.sub.2) Laser (157 nm) Excited by an Intense Electric Discharge," Masayuki Kakehata, Tatsuya Uematsu, Fumihiko Kannari, and Minoru Obara, 10 pgs.
Journal of Modern Optics, vol. 37, No. 4, Apr. 1990, "Amplification characteristics of a discharge excited F.sub.2 laser," C. Skordoulis. E. Sarantopoulou, S. Spyrou and A.C. Cefalas, 12 pgs.
Optics Communications, vol. 55, No. 6, Oct. 15, 1985, "Gain Measurements at 157 nm in an F.sub.2 Pulsed Discharge Molecular Laser," A.C. Cefalas, C. Skordoulis, M. Kompitasas and C.A. Nicolaides, 6 pgs.
Applied Physics Letters, vol. 54, Feb. 13, 1989, No. 7, "High-power discharge-pumped F.sub.2 molecular laser," Kawakatsu Yamada, Kenzo Miyazaki, Toshifumi Hasama, and Takuzo Sata, 6 pgs.
Leos '89, Lasers and Electro-Optics Society Annual Meeting Conference Proceedings, Oct. 17 20, 1989, Orlando, Florida. "High Power Discharge Pumped F.sub.2 Laser," K. Yamada, K. Miyazaki, T. Hasama, T. Sato, M. Kasamatsu, and Y. Mitsuhashi, 13 pgs.
Journal of Applied Physics, vol. 53, May 1982, No. 5, "Gain and saturation of the atomic fluorine laser," R. Sadighi-Bonabi, F.W. Lee, and C.B. Collins, 11 pgs.
Conference on Lasers and Electro-Optics, 1989 Technical Digest Series, vol. 11, May 24-28, 1989, Baltimore, Maryland, "Intense VUV-XUV generation from rare gas excimers," Wataru Sasaki, Kou Kurosawa, 23 pgs.
Soviet Journal of Quantum Electronics, 16(5) May 1986, "High-power efficient vacuum ultraviolet F.sub.2 laser excited by an electric discharge," V.N. Ishchenko, S.A. Kochubei, and A.M. Kazhev, 9 pgs.
Optics Communications, vol. 28, No. 1, Jan. 1979, "Discharge pumped F.sub.2 Laser at 1580 A", H. Pummer, K. Hohla, M. Diegelmann and J.P. Reilly, 6 pgs.
Gas Flow and Chemical Lasers, SPIE No. 1397, Sep. 10-14, 1990, "Frequency up conversion of a discharge pumped molecular fluorine laser by stimulated Raman scattering in H.sub.2," Masayuki Kakehata, Etsu Hashimoto, Fumihiko Kannari, and Minoru Obara, 16 pgs.
The Journal of Chemical Physics, vol. 69, Sep. 15, 1978, "An efficient, high power F.sub.1 laser near 157 nm.sup.-1," Joseph R. Woodworth and James K. Rice, 11 pgs.
Vorhandlungen, 3/1590, Phsyikertagung Munchen, 1990, Optimierung der VUV-Emission bei 157 nm (F.sub.2 -Linie) bei antladungs gepemten Excimerlasern, F. Voss, 2 pgs.
Tasgungsband, Vom, 24, Bis. Sep 26, 1991, Abstract: "Vakuum UV Molekullaser mit hoher Ausgangsleistung," 3 pgs.
Applied Physics Letters, vol. 51, No. 13, Sep. 28, 1997, "Theoretical evaluation of high-efficiency operation of discharge-pumped vacuum-ultraviolet F.sub.2 lasers," Mieko Ohwa and Minoru Obara, 6 pgs.
Applied Optics VUV VI, vol. 19, No. 23, Dec. 1, 1980, "Vacuum ultraviolet excimer lasers," M.H.R. Hutchinson, 9 pgs.
Review of Scientific Instruments, vol. 56, No. 5, Part 1, May 1985, "Simple, compact, high-repetition rate XeCI laser," E. Armandillo, G. Grasso, and G. Salvetti, 7 pgs.
Applied Physics Letters, vol. 31, No. 1, Jul. 1, 1977, "vuv emissions from mixtures of F.sub.2 and the noble gasses A molecular F.sub.1 laser at 1575 .ANG..sup.-1," James K. Rice, A. Kay Hays, and Joseph R. Woodwsorth, 5 pgs.
Applied Physics Letters, vol. 63, No. 4, Jul. 26, 1993, "Small-signal gain measurements in an clectron beam pumped F.sub.2 laser," H.M.J. Bassiaens, B.MN.C. van Dam, P.J.M. Peters, and W. J. Witteman, 7 pgs.
ZOS, Akademie der Wissenschaften der DDR, Zentralinstitut fur Optik und Wissenschaften der DDR, Oktober 1987, "Leistungaslarker atomarer Fluorlaser im roten Spektralbereich," Jurgen Lademann, Roland Kunig, Wadim Saldow, Rainer Weidauer, 12 pgs.
Discharge-Pumped Excimer Laser Research in Japan, Apr. 1988, "Theoretical simulation of a discharge pumped F.sub.2 excimer laser," T. Oematsu et al, Koio U.
Science Report, Lambdaphysik, No. 3, Nov. 1990, "Breakthrough in F.sub.2 Laser Technology," 4 pgs.
Institut Fur Quantenoptik, Oct. 22, 1991, "Stimulated Raman scattering of a F.sub.2 -Laser in H.sub.2," C. Momma, A. Tunnermann, F. Vo.beta., C. Windolph and B. Wellegehausen, 8 pgs.
Highlights, Lambdaphysik, No. 33, Feb. 1992, "VUV Stokes and Anti-Stokes Raman Lines Derived from an F.sub.2 Laser," C. Momman, A Tunermann, F. Vo.beta., C. Windolph, and H. Wellegehausen, 5 pgs.
Highlights, Lambdaphysik, No. 43, Jan. 1994, "Photochemical modificati
Basting Dirk
Govorkov Sergei V.
Stamm Uwe
Jr. Leon Scott
Lamba Physik GmbH
LandOfFree
Molecular fluorine (F.sub.2) laser with narrow spectral linewidt does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Molecular fluorine (F.sub.2) laser with narrow spectral linewidt, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Molecular fluorine (F.sub.2) laser with narrow spectral linewidt will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1732797