Molecular drag, turbomolecular, or hybrid pump with an...

Rotary kinetic fluid motors or pumps – With means for re-entry of working fluid to blade set – Turbine regenerative pump

Reexamination Certificate

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Details

C415S090000

Reexamination Certificate

active

10843354

ABSTRACT:
A molecular drag, turbomolecular, or hybrid turbo/drag pump (5) of the invention has an outlet stage with a cylindrical peripheral wall (17) and a radial outlet orifice (23) passing through the cylindrical peripheral wall (17). An annular coaxial closure member (24) bears against the cylindrical peripheral wall (17) around the radial outlet orifice. The annular coaxial closure member (24) includes a through slot and optionally also a total closure shutter (26). The annular coaxial closure member (24) is caused to turn about the axis of the cylinder by a motor (8) in order to place its through slot or its total closure shutter (26) in register with the radial outlet orifice (23), or partially in register with the radial outlet orifice (23) in order to adjust the opening of the valve and regulate the gas flow pumped by the pump (5). A pump is thus provided that includes an integrated regulator and/or closure valve.

REFERENCES:
patent: 4797062 (1989-01-01), Deters et al.
patent: 4954047 (1990-09-01), Okuyama et al.
patent: 5118251 (1992-06-01), Saulgeot
patent: 5443368 (1995-08-01), Weeks et al.
patent: 5893702 (1999-04-01), Conrad et al.
patent: 5927940 (1999-07-01), Lotz
patent: 6644931 (2003-11-01), Puech
patent: 0 585 911 (1994-03-01), None
patent: WO 99/04325 (1999-01-01), None

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