Electric resistance heating devices – Heating devices – Vaporizer
Reexamination Certificate
2008-05-06
2008-05-06
Bueker, Richard (Department: 1792)
Electric resistance heating devices
Heating devices
Vaporizer
C118S726000
Reexamination Certificate
active
11183720
ABSTRACT:
A molecular beam source for use in accumulation of organic thin-films which enables the forming of a uniform thin-film on film-forming surfaces of a large-sized substrate, but without producing deposition or separation of a film-forming material in an opening for discharging molecules of the film-forming material, wherein a valve33is disposed in a space starting from a side of a molecule heating portion12and reaching to a molecule discharge opening14for discharging the generated molecules of the film-forming material towards a film-forming surface and, further, heaters18and19are provided at a side of the molecule discharge opening14for heating the molecules of the film-forming material to be discharged. At the side of the molecule discharge opening14are provided an exterior guide13having a tapered guide wall and also an interior guide16having a tapered guide wall is provided within an inside of the exterior guide. Between the exterior guide13and interior guide16, there is formed a molecule discharge passage17in which the diameter thereof gradually increases along a direction of the discharge of the molecules therefrom. The heaters18and19are provided on the exterior guide13and the interior guide16, respectively and, further, there is provided a heater20penetrating through the molecule discharge opening14, whereby narrowing and/or blockage hardly occur in the discharge opening.
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Webster's II New Riverside University Dictionary, Houghton Mifflin Co., 1984. pp. 859 and 869.
Kobayashi Osamu
Saito Tateo
Bueker Richard
Chosu Industry Co., Ltd.
Flynn ,Thiel, Boutell & Tanis, P.C.
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