Molecular beam source

Details Molecular beam source Molecular beam source

1987-01-21

1988-05-31

Goldberg, E. A.

Electric heating

Heating devices

Resistive element: igniter type

219271, 219426, 219424, 118726, 338294, 373118, C23C 1426

Patent

active

047483156

ABSTRACT:
A molecular beam source suppresses a temperature fall at the opening of a crucible, to make a temperature distribution within the crucible uniform and to prevent the phenomenon of bumping of a source substance, whereby the quality of an evaporated film can be enhanced. The source includes a heater disposed around the crucible which is formed of straight parts and U-shaped end parts continuously repeated at equal intervals. The straight parts are arranged so as to extend in a vertical direction of the crucible and the U-shaped end parts are bent outwards at outer-peripheral positions of the opening of the crucible.

REFERENCES:
patent: 1975410 (1934-10-01), Simpson
patent: 2650254 (1953-08-01), Kremers
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patent: 4410796 (1983-10-01), Wilsey
patent: 4503319 (1985-03-01), Moritoki
patent: 4553022 (1985-11-01), Colombo

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