Molecular beam epitaxy effusion cell

Details Molecular beam epitaxy effusion cell Molecular beam epitaxy effusion cell

1995-06-23

1996-07-30

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

118724, 118725, 117201, 117203, C23C 1600

Patent

active

055407803

ABSTRACT:
A temperature controlled source cell for use in the practice of thin film depositions by molecular beam epitaxy is described which includes an optical sensor for monitoring source temperature, the sensor including a light pipe having one end near the source and the other end coupled to a fiber optic probe which carries light from the light pipe to a remote optical detector.

REFERENCES:
patent: 4018566 (1977-04-01), Zeuch et al.

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