Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction
Patent
1987-11-30
1989-03-07
Doll, John
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Including specific material of construction
118500, 118719, 118730, C30B 3500
Patent
active
048104736
ABSTRACT:
In a molecular beam epitaxy apparatus in accordance with the present invention, transfer means for transferring substrates, which have been transferred from an introduction chamber, to a growth chamber and for transferring the substrates after the growth of a film, which have been transferred from the growth chamber, to a discharge chamber consists of a rotary disc which supports thereon a plurality of substrates and transfers them to the growth chamber and then to the discharge chamber, and all of the introduction chamber, the growth chamber and the discharge chamber are disposed at predetermined positions, respectively, so that the molecular beam crystal growth can be effected in a clean room which is separated from a maintenance room.
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IBM Technical Disclosure Bulletin, "Report for Pyrolytic Vapor Deposition on Thin Films", vol. 16, No. 4, 9/73, S. Zirinsky.
Ichihashi Kazuaki
Kamohara Hideaki
Kanai Norio
Tamura Naoyuki
Breneman R. Bruce
Doll John
Hitachi , Ltd.
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