Molecular beam epitaxial growth device and molecular beam contro

Details Molecular beam epitaxial growth device and molecular beam contro Molecular beam epitaxial growth device and molecular beam contro

1991-12-04

1992-09-15

Bueker, Richard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Temperature responsive

118688, 118708, 118712, 118715, 118724, 118726, C23C 1422

Patent

active

051474611

ABSTRACT:
A measured molecular beam intensity V.sub.i is converted into a value V.sub.iO at a reference temperature T.sub.O by calculating the following equation using the measured molecular beam intensity V.sub.i and a measured cell temperature T.sub.i : V.sub.iO =V.sub.i .multidot.exp(A(1/T.sub.O -1/T.sub.i)). Next, a molecular beam intensity V.sub.O (t) at a time (t) is estimated after the last conversion time based on the reference temperature T.sub.O in accordance with the converted molecular beam intensity V.sub.iO and a corresponding time t.sub.i thereof. Further, the temperature of a molecular beam source cell is controlled in accordance with an estimated cell temperature T.sub.SP (V.sub.SP), to realize a predetermined molecular beam intensity V.sub.SP, given by calculating the following equation using the estimated molecular beam intensity V.sub.O (t) and the predetermined molecular beam intensity V.sub.SP : T.sub.SP (V.sub.SP)=1/(1/T.sub.O +(log(V.sub.SP /V.sub.O (t)))/A).

REFERENCES:
patent: 3839084 (1974-10-01), Cho
patent: 4119846 (1978-10-01), Outhwaite
patent: 4636268 (1987-01-01), Tsang
patent: 4855013 (1989-08-01), Ohta

Affiliated with

Also associated with

Rating

Molecular beam epitaxial growth device and molecular beam contro does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Molecular beam epitaxial growth device and molecular beam contro, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Molecular beam epitaxial growth device and molecular beam contro will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-733788