Coating apparatus – With cutting – punching or tearing of work – Web or sheet work
Patent
1976-12-30
1979-02-06
McIntosh, John
Coating apparatus
With cutting, punching or tearing of work
Web or sheet work
C23C 1308
Patent
active
041378652
ABSTRACT:
Apparatus for molecular beam deposition sequentially on a plurality of substrates is described. The apparatus includes a growth chamber and an auxiliary (sample-exchange) chamber coupled by an air-lock. The substrates are carried by a rod which can be translated via a bellows mechanism between the two chambers. The auxiliary chamber includes a port which permits access to the samples so that the entire rod-bellows mechanism need not be removed in order to change samples. The auxiliary chamber also includes means for maintaining therein an inert atmosphere at a pressure in excess of atmospheric pressure especially when the port is open. The growth chamber includes a cylindrical LN.sub.2 shroud which has an aperture in its wall to admit molecular beams to only a heated (growth) substrate. The unheated (idle) substrates are thus shaded from the beams. In addition, the shroud surrounds both the growth substrate and idle substrates in the growth chamber. This configuration of the shroud reduces the likelihood of contamination of idle substrates. In addition, the growth chamber includes means for selectively heating the growth substrate, the idle substrates remaining unheated so as to reduce the evaporation of high vapor pressure elements therefrom.
Another aspect of the invention is the provision of uniquely designed pyrolytic BN effusion cells for generating the various molecular beams.
REFERENCES:
patent: 3921572 (1975-11-01), Brunner et al.
Journal of Applied Physics, vol. 46, No. 6, Jun. 1975, pp. 2366-2374, Smith et al., "Molecular Beam Epitaxy of II-VI Compounds."
Bell Telephone Laboratories Incorporated
McIntosh John
Urbano Michael J.
LandOfFree
Molecular beam apparatus for processing a plurality of substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Molecular beam apparatus for processing a plurality of substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Molecular beam apparatus for processing a plurality of substrate will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-886790