Molded fluoroelastomer with excellent detachability and...

Details Molded fluoroelastomer with excellent detachability and... Molded fluoroelastomer with excellent detachability and...

2006-10-24

2006-10-24

Watkins, III, William P. (Department: 1772)

Stock material or miscellaneous articles

Structurally defined web or sheet

Continuous and nonuniform or irregular surface on layer or...

C428S195100, C524S544000, C524S545000, C524S546000

Reexamination Certificate

active

07125598

ABSTRACT:
There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 μm or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.

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