Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting
Patent
1981-06-09
1984-02-21
Albritton, C. L.
Electrical resistors
Resistance value responsive to a condition
Gas, vapor, or moisture absorbing or collecting
H01L 700
Patent
active
044333196
ABSTRACT:
A moisture sensor including a thin layer of tantalum oxide applied to a moisture insensitive substrate and at least two electrodes placed on the tantalum oxide layer spaced apart from each other wherein the tantalum oxide layer comprises the oxide of a highly resistive low density tantalum where the tantalum in the layer applied to the substrate has a density of less than 15 g/cm.sup.3.
REFERENCES:
patent: 4358748 (1982-11-01), Gruner et al.
Kallfass Traugott
Luder Ernst
Albritton C. L.
Baker Joseph J.
Endress u. Hauser GmbH u. Co.
Ferguson Jr. Gerald J.
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