Moisture sensor and method of manufacturing the same

Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting

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H01L 700

Patent

active

044333196

ABSTRACT:
A moisture sensor including a thin layer of tantalum oxide applied to a moisture insensitive substrate and at least two electrodes placed on the tantalum oxide layer spaced apart from each other wherein the tantalum oxide layer comprises the oxide of a highly resistive low density tantalum where the tantalum in the layer applied to the substrate has a density of less than 15 g/cm.sup.3.

REFERENCES:
patent: 4358748 (1982-11-01), Gruner et al.

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