Moisture sensor and a process for the production thereof

Details Moisture sensor and a process for the production thereof Moisture sensor and a process for the production thereof

1983-07-25

1986-01-07

Metz, Andrew H.

Measuring and testing

Gas analysis

Moisture content or vapor pressure

733365, 204430, 338 34, 427 38, 427 41, 427 58, G01N 3100

Patent

active

045627258

ABSTRACT:
A novel moisture sensor which comprises a moisture sensitive film formed either between a pair of electrodes or on any of the electrode which are formed on a solid substrate for a moisture sensor, said moisture sensitive film is made of a plasma polymerized polymer thin film having hydrophilic groups incorporated into its surface layer, which shows an excellent resistance to water and chemicals and a good moisture responsibility, and a process for the production thereof; and a moisture measuring cell which has the aforesaid moisture sensor and is equipped with a sample inlet part and an outlet part.

REFERENCES:
patent: 2728831 (1955-12-01), Pope
patent: 3056935 (1962-10-01), Jensen
patent: 3247478 (1966-04-01), Craig
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patent: 3559456 (1971-02-01), Lomker et al.
patent: 3671913 (1972-06-01), Mamiya et al.
patent: 3891958 (1975-06-01), Wakabayashi
patent: 3983527 (1976-09-01), Ohsato et al.
patent: 4343688 (1982-08-01), Harwood
patent: 4386336 (1983-05-01), Kinomoto et al.

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