Moisture sensor and a method for the production of the same

Details Moisture sensor and a method for the production of the same Moisture sensor and a method for the production of the same

1985-05-13

1987-03-17

Goldberg, E. A.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

338 34, 361286, H01L 700, H01G 520

Patent

active

046511210

ABSTRACT:
A moisture sensor comprising a substrate; a bottom electrode on the substrate; a moisture sensitive film sandwiched between an upper electrode and the bottom electrode on the substrate; a pair of connection terminals one of which is extended on the substrate from the bottom electrode and the other of which is formed on the substrate to be connected to the upper electrode; a step-shaped extension extended on the end of the moisture sensitive film from the upper electrode to the connection terminal for the upper electrode; and a metal film which covers said step-shaped extension.

REFERENCES:
patent: 3380136 (1968-04-01), Wydro, Sr.
patent: 3984907 (1976-10-01), Vossen, Jr. et al.
patent: 4164868 (1979-08-01), Suntola

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