Moisture sensor

Details Moisture sensor Moisture sensor

2006-10-24

2011-12-20

Williams, Hezron E (Department: 2856)

Measuring and testing

Gas analysis

Moisture content or vapor pressure

Reexamination Certificate

active

08079248

ABSTRACT:
A moisture sensor includes interdigitated first and second electrodes formed in trenches A porous low-k dielectric is provided between the electrodes. The electrodes are of Cu surrounded by a barrier layer to protect the Cu from corrosion. TiN may be used as barrier layer and selectively deposited barrier material such as CoWB, MoWB or NiMoP as barrier layer.

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