Measuring and testing – Gas analysis – Moisture content or vapor pressure
Patent
1989-12-29
1991-09-17
Williams, Herzon E.
Measuring and testing
Gas analysis
Moisture content or vapor pressure
73 2905, 338 35, G01N 2712
Patent
active
050483366
ABSTRACT:
A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.
REFERENCES:
patent: 4419888 (1983-12-01), Kitamura et al.
patent: 4562725 (1986-01-01), Oka et al.
patent: 4723439 (1988-02-01), Asakura et al.
patent: 4740387 (1988-04-01), Manaka
patent: 4928513 (1990-05-01), Sugihara et al.
Copy of European Search Report.
K. Uda et al., "Micro-Bridge Type Absolute Humidity Sensor", The 9th Chemical Sensor Symposium, Aoyama Gakuin University, Oct. 21-22, 1989.
Furubayashi Hisatoshi
Hashizume Nobuo
Inami Yasuhiko
Miyoshi Shuji
Sugihara Takashi
Roskos Joseph W.
Sharp Kabushiki Kaisha
Williams Herzon E.
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