Moisture permeable electrode in a moisture sensor

Details Moisture permeable electrode in a moisture sensor Moisture permeable electrode in a moisture sensor

1984-03-16

1985-01-29

Envall, Jr., Roy N.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

338 35, 73335, 733365, H01L 700, H01G 520

Patent

active

044969317

ABSTRACT:
A thin-film moisture sensor includes a moisture sensitive polymer film formed on a bottom electrode which is carried on a substrate, and a moisture permeable upper electrode formed on the polymer film. The moisture permeable upper electrode is made of an indium (In) thin-film. In another form, the moisture permeable upper electrode is made of a two-layered electrode including an indium (In) thin-film and a gold (Au) thin-film formed on the indium (In) thin-film.

REFERENCES:
patent: 2728831 (1955-12-01), Pope
patent: 3395089 (1968-07-01), Mayer et al.
patent: 4429343 (1984-01-01), Freud
patent: 4442422 (1984-04-01), Murata et al.
Halperin et al., "Applying Conductive Coating to a Deformable Polymer", IBM Technical Disclosure Bulletin, vol. 16, No. 7, Dec. 73, p. 2047.

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