Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate
2005-03-15
2005-03-15
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
Triangulation
C356S604000
Reexamination Certificate
active
06867871
ABSTRACT:
A moving distance of a moiré grating in y direction is set with respect to a grating pitch of a moiré grating, whereas an imaging magnification of imaging means is set according to the relationship between the pixel pitch of an image pickup device in the imaging means and the size of grating pitch when forming an image on the image pickup device. An image of moiré fringes is captured each time when the moiré grating is moved by a predetermined distance in the y direction, so as to yield a predetermined number of y-direction positional moiré fringe images, which are then averaged. According to thus obtained average moiré fringe image, shape information of a surface to be inspected is determined.
REFERENCES:
patent: 3762818 (1973-10-01), Johnson et al.
Fuji Photo Optical Co., Ltd.
Punnoose Roy M.
Snider Ronald R.
Snider & Associates
Toatley , Jr. Gregory J.
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