Moiré grating noise eliminating method

Optics: measuring and testing – Shape or surface configuration – Triangulation

Reexamination Certificate

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C356S604000

Reexamination Certificate

active

06867871

ABSTRACT:
A moving distance of a moiré grating in y direction is set with respect to a grating pitch of a moiré grating, whereas an imaging magnification of imaging means is set according to the relationship between the pixel pitch of an image pickup device in the imaging means and the size of grating pitch when forming an image on the image pickup device. An image of moiré fringes is captured each time when the moiré grating is moved by a predetermined distance in the y direction, so as to yield a predetermined number of y-direction positional moiré fringe images, which are then averaged. According to thus obtained average moiré fringe image, shape information of a surface to be inspected is determined.

REFERENCES:
patent: 3762818 (1973-10-01), Johnson et al.

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