Module positioning apparatus

Details Module positioning apparatus Module positioning apparatus

1986-05-08

1987-10-13

Aschenbrenner, Peter A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414222, B65G 6500

Patent

active

046995552

ABSTRACT:
A housing has a flange for engagement with an evacuable vessel having a work table for supporting devices to be processed with an ion beam inside the vessel. The housing has rails extending into the vessel toward the work table. A carriage rides on the rails and has upstanding pins that engage a cassette carrying the masks to be processed. A transport mechanism housing is in sealing relationship with the bottom of the housing and supports a motor-driven drum about which a steel tape is wrapped and surrounded by a circumferential set of rollers. The far end of the steel tape is connected to the carriage. A loading door selectively closes the opening of the housing away from the vessel. The top of the housing includes a glass port.

REFERENCES:
patent: 3641973 (1972-02-01), Shrader
patent: 4336438 (1982-06-01), Uehara et al.
patent: 4543059 (1985-09-01), Whang et al.
patent: 4589540 (1986-05-01), Kampf
patent: 4604020 (1986-08-01), Torolira et al.
patent: 4609320 (1986-09-01), Rubin
patent: 4636128 (1987-01-01), Millis et al.
patent: 4643629 (1987-02-01), Takahashi et al.
patent: 4649830 (1987-03-01), Tanaka

Affiliated with

Also associated with

Rating

Module positioning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Module positioning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Module positioning apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-409059