Module for transferring a substrate

Details Module for transferring a substrate Module for transferring a substrate

2006-06-27

2006-06-27

Gravini, S. (Department: 3749)

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

Reexamination Certificate

active

07065898

ABSTRACT:
A module for transferring a substrate includes a load port for supporting a container to receive a plurality of substrates, a substrate transfer chamber disposed between the load port and a substrate process module, a substrate transfer robot disposed in the substrate transfer chamber for transferring the substrates between the container and the substrate process module, a gas supply unit connected to the substrate transfer chamber for supplying a purge gas into the substrate transfer chamber to purge an interior of the substrate transfer chamber, and a contamination control unit connected to the substrate transfer chamber for circulating the purge gas supplied into the substrate transfer chamber, resupplying the circulated purge gas into the substrate transfer chamber and removing particles and airborne molecular contaminants from the purge gas being circulated. Contamination of a substrate may be prevented and a necessary amount of purge gas may be reduced.

REFERENCES:
patent: 6041819 (2000-03-01), Walleman
patent: 6146468 (2000-11-01), Dryer et al.
patent: 6224679 (2001-05-01), Sasaki et al.
patent: 6364762 (2002-04-01), Kaveh et al.
patent: 6497734 (2002-12-01), Barber et al.
patent: 6610123 (2003-08-01), Wu et al.
patent: 6797617 (2004-09-01), Pomarede et al.
patent: 10-2004-0047303 (2004-06-01), None

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