Modulation circuit with integrated microelectro-mechanical...

Oscillators – Electrical noise or random wave generator

Reexamination Certificate

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C331S17700V, C331S179000, C331S181000

Reexamination Certificate

active

07417511

ABSTRACT:
A modulation circuit includes a microelectronic electromechanical system (MEMS) based resonant structure having a resonant frequency, an excitation input and an output. A control module is coupled to the excitation input of the MEMS based resonant structure. The control module modifies resonant characteristics of the MEMS based resonant structure to modulate the resonant frequency of the MEMS based resonant structure to produce a modulated signal at the output.

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