Modular vacuum system for the treatment of disk-shaped workpiece

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

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414939, F16J 1200

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active

056581149

ABSTRACT:
Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single block of metal having external walls, an internal wall, and side-by-side openings which align with side-by-side openings in an adjacent unit.

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