Modular vacuum system for the treatment of disk-shaped workpiece

Details Modular vacuum system for the treatment of disk-shaped workpiece Modular vacuum system for the treatment of disk-shaped workpiece

1995-02-15

1997-08-19

Brahan, Thomas J.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414939, F16J 1200

Patent

active

056581149

ABSTRACT:
Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single block of metal having external walls, an internal wall, and side-by-side openings which align with side-by-side openings in an adjacent unit.

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