Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2005-07-12
2005-07-12
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000, C355S075000, C355S077000
Reexamination Certificate
active
06917412
ABSTRACT:
Methods and apparatus for providing a stage apparatus which is modular and allows for reaction force cancellation are described. According to one aspect of the present invention, a stage apparatus includes a table assembly and a first stage. The table assembly supports an object, e.g., a wafer or a reticle, which is to be moved. The first stage includes a counter mass arrangement, a plurality of carriages, and a plurality of linkages. The plurality of carriages is coupled to the table assembly through the plurality of linkages such that a first carriage and a second carriage are arranged to move in substantially opposite directions along a first axis to cause the table assembly to move along a second axis while reaction forces generated when the first carriage and the second carriage are substantially cancelled by the counter mass arrangement.
REFERENCES:
patent: 6028376 (2000-02-01), Osanai et al.
patent: 6084673 (2000-07-01), Van Den Brink et al.
patent: 6194859 (2001-02-01), Everman et al.
patent: 6396566 (2002-05-01), Ebinuma et al.
patent: 11-274273 (1999-10-01), None
Chang Ping-Wei
Kho Leonard Wai Fung
Poon Alex Ka Tim
Yang Pai-Hsueh
Kim Peter B.
Nikon Corporation
Ritter Lang & Kaplan LLP
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