Optics: measuring and testing – Of light reflection – With diffusion
Patent
1990-06-29
1993-03-23
Willis, Davis L.
Optics: measuring and testing
Of light reflection
With diffusion
G01N 2147
Patent
active
051969068
ABSTRACT:
An optical measurement device produces quality light scatter measurements using Bidirectional Reflective Distribution Function (BRDF) techniques to analyze data generated from an accurate, portable, relatively inexpensive scatterometer. The scatterometer is provided with interchangeable scanning heads, each scanning head being equipped with ROM data storage containing certain configuration information about the scanning head. The use of the interchangeable scanning heads allows the present invention to make measurements of light scatter for a wide variety of applications and samples under a variety of environmental conditions where scatter measurement has previously not been feasible.
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Bender James A.
Bernt Marvin L.
Bjork Donald R.
Chausse Paul D.
Cheever Daniel R.
Hantis K. P.
TMA Technologies, Inc.
Willis Davis L.
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