Modular pressure sensor

Measuring and testing – Fluid pressure gauge – With protective separator

Reexamination Certificate

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Reexamination Certificate

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08065917

ABSTRACT:
A pressure sensor device for a modular pressure sensor package is provided, comprising a substrate having a pressure port that extends through the substrate from a first side of the substrate to a second side of the substrate. A pressure sensor die is attached to the first side of the substrate, forming a seal over the pressure port on the first side of the substrate. A cover is attached to the first side of the substrate over the pressure sensor die, forming a sealed cavity wherein the pressure sensor die is located within the cavity. The device also comprises a plurality of electrical connectors mounted to the substrate external to the cavity, the plurality of electrical connectors electrically coupled to the pressure sensor die. Further, the substrate includes at least one mounting element configured to secure a pressure port interface to the second side of the substrate in a position around the pressure port.

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patent: 5438876 (1995-08-01), Lewis
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patent: 5522267 (1996-06-01), Lewis
patent: 7210346 (2007-05-01), Hoover et al.
patent: 7647835 (2010-01-01), Speldrich
patent: 2006/0001992 (2006-01-01), Friedrichs
patent: 2007/0062601 (2007-03-01), Ballard
patent: 2009/0293628 (2009-12-01), Brown et al.
patent: 2009/0293630 (2009-12-01), DiPaola et al.

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