Modular particle monitor for vacuum process equipment

Details Modular particle monitor for vacuum process equipment Modular particle monitor for vacuum process equipment

1993-05-13

1995-07-25

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356338, G01N 1506

Patent

active

054364655

ABSTRACT:
An apparatus and a method provide a modular design for a particle monitor of external design used in a vacuum process equipment. In one embodiment, the key elements, i.e. laser assembly, the detection module, the beam stop and a darkened surface opposite the detection module, can be independently mounted on a pump line. The particle monitors of the present invention can be mounted on both straight sections and bends of the pump line. Each key element can be accessed independently of other key elements for repair and service.

REFERENCES:
patent: 4663522 (1987-05-01), Welbourn et al.
patent: 4739177 (1988-04-01), Borden
patent: 4979822 (1990-12-01), Sommer

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