Modular gas laser discharge unit

Details Modular gas laser discharge unit Modular gas laser discharge unit

2005-02-22

2005-02-22

Ip, Paul (Department: 2828)

Coherent light generators

Particular pumping means

Electrical

C375S213000, C375S213000, C375S213000, C375S213000, C375S213000

Reexamination Certificate

active

06859482

ABSTRACT:
A laser discharge unit is provided. The discharge unit includes an elongated electrode plate, an elongated high voltage electrode, and an elongated ground electrode. Both the high voltage electrode and the ground electrode are mounted to the electrode plate in a spaced-apart relationship with their longitudinal axis being substantially parallel to thereby define a gas discharge gap between the electrodes. The gas laser discharge unit may be removably mounted as a module into a gas laser such as an excimer laser.

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