Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate
1999-03-16
2001-10-09
Fox, John (Department: 3753)
Fluid handling
Systems
With flow control means for branched passages
C285S924000
Reexamination Certificate
active
06298881
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to a modular fluid handling assembly for conducting or distributing one or more fluids, and the individual modular fluid handling units comprising the assembly. More particularly, the invention relates to a modular fluid handling assembly, and individual units, with double-containment sealing capability. The invention further relates to a modular fluid handling assembly, and individual units, which allow for continuous monitoring of, and drawing off of, fluid leakage.
2. Description of the Related Art
In the semiconductor manufacturing industry, many hazardous fluids are used and must be carefully handled to prevent damage to equipment and injury to both the environment and production employees. Examples of such fluids include toxic and corrosive gases such as SiH
4
, BCl
3
, and HCl. These fluids must be kept as pure as possible during all aspects of the handling and supply, since any contact of the flow stream with a contaminant may result in defects in the manufactured products. These defects are usually not detected until after the manufacturing operation has been completed.
During the manufacturing process, certain fluids must be distributed to various locations in precise amounts. To accomplish this, the industry has used gas sticks, which comprise a plurality of discrete blocks connected together, and on which a plurality of external devices may be mounted.
FIGS. 6
a
-
6
c
depict one such conventional block.
The conventional block
90
includes a fluid passage
91
, and associated ports
92
,
92
′, through which a process fluid flows. The block
90
also includes external device passages
93
,
94
and associated ports
95
,
95
′,
96
,
96
′, for fluid communication with an external device
97
. When two or more blocks
90
are connected together, the process fluid flows through and among the blocks
90
and one or more external devices
97
by way of the internally bored passages
91
,
93
,
94
and associated ports
92
,
92
′,
95
,
95
′,
96
,
96
′. These discrete blocks
90
and external devices
97
require numerous junctions, which result in numerous opportunities for leakage.
To alleviate leakage between and among the discrete blocks
90
and external devices
97
, the industry has used metallic compression seals
98
at junctions between the individual passage ports
92
,
92
′,
95
,
95
′,
96
,
96
′. However, these individual seals
98
are still subject to leakage. Even extremely small amounts of leakage can result in personnel injury, equipment damage, or manufacturing defects. Typically, these leaks are detected only by detecting product degradation or by removing the entire gas stick from the system and performing a conventional leak test.
SUMMARY OF THE PRESENT INVENTION
It is therefore a principal object of the present invention to provide a modular fluid handling assembly for conducting or distributing one or more fluids, and the individual modular fluid handling units comprising the assembly, with double-containment sealing to prevent leakage or contamination of the fluid.
Another object of the present invention is to provide a modular fluid handling assembly, and the individual modular fluid handling units comprising the assembly, with a negative pressure source continuously connected to a region between adjacent units to provide an improved seal connection therebetween.
Still another object of the present invention is to provide a modular fluid handling assembly, and the individual modular fluid handling units comprising the assembly, with a negative pressure source continuously connected to a region between adjacent units to draw off any fluid that may leak from a fluid passage port.
Yet another object of the present invention is to provide a modular fluid handling assembly including a detector for detecting leakage of fluid.
In one aspect of the present invention, a modular fluid handling assembly includes a plurality of fluid handling units. Each fluid handling unit includes a fluid passage and associated port, a vacuum passage and associated ports, a vacuum pressure source, and a containment seal. The fluid passage ports and vacuum passage ports of adjacent fluid handling units respectively communicate. The vacuum pressure source is in communication with the vacuum passages of the fluid handling units. The containment seal is disposed between adjacent fluid handling units and surrounds the communicating fluid passage ports and vacuum passage ports.
In a further aspect of the present invention a modular fluid handling unit includes a fluid passage, a vacuum passage, and a containment seal. The fluid passage extends through the unit and includes two fluid passage ports. The vacuum passage extends through the unit and includes a vacuum passage port proximate each fluid passage port. A containment seal surrounds the vacuum passage ports and proximate fluid passage ports.
In yet a further aspect of the present invention a modular fluid handling assembly includes a plurality of fluid handling units. Each fluid handling unit includes at least one fluid passage and an associated fluid passage port. A fluid passage port of one fluid handling unit communicates with a fluid passage port of an adjacent fluid handling unit. A primary seal is included between fluid passage ports of adjacent fluid handling units, and a secondary seal surrounds the primary seal. A means for applying a negative pressure source to a region between adjacent fluid handling units and between the primary and secondary seals is also included. The negative pressure applying means generates a force urging adjacent fluid handling units together.
These and other objects, aspects, advantages and features of the present invention will become more apparent to those skilled in the art when the following detailed description is read in conjunction with the accompanying drawings.
REFERENCES:
patent: 4019371 (1977-04-01), Chaplin et al.
patent: 4253482 (1981-03-01), Stephens
patent: 4430927 (1984-02-01), Turnbull
patent: 4476897 (1984-10-01), Morrill
patent: 4921072 (1990-05-01), Divisi
patent: 5090871 (1992-02-01), Story et al.
patent: 5170659 (1992-12-01), Kemp
patent: 5197766 (1993-03-01), Glover et al.
patent: 5368648 (1994-11-01), Sekizuka
patent: 5394903 (1995-03-01), Tominaga
patent: 5419360 (1995-05-01), Lechevalier
patent: 5605179 (1997-02-01), Strong, Jr. et al.
patent: 5725022 (1998-03-01), Taka et al.
patent: 5832956 (1998-11-01), Nimberger
patent: 5836355 (1998-11-01), Markulec et al.
patent: 6000422 (1999-12-01), Shigemoto
Amores Lope M.
Annett John
Curran William J.
Shigemoto Hiromi Dick
Fitzpatrick ,Cella, Harper & Scinto
Fox John
Shigemoto & Annett II, Inc.
LandOfFree
Modular fluid handling assembly and modular fluid handling... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Modular fluid handling assembly and modular fluid handling..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Modular fluid handling assembly and modular fluid handling... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2614636