Fluid handling – Convertible – Reversible check
Patent
1997-09-25
2000-05-30
Lee, Kevin
Fluid handling
Convertible
Reversible check
137271, 137884, F16K 1100
Patent
active
060680164
ABSTRACT:
This disclosure describes a modular, monolithic pump-purge system which can be integrated into a modular, monolithic fluid handling system without creating a closed tolerance loop. In particular, the pump-purge system comprises a plurality of valves mounted on a modular and monolithic manifold which can be attached to the modular, monolithic fluid handling system. At least a portion, and preferably all of the fluid transfer conduits necessary for either applying a vacuum (or other evacuation means) to a fluid handling system conduit which is to be evacuated (pumped), or for transfer of flushing fluid within a conduit (purging) are present within monolithic manifolds of the fluid handling system. The modular, monolithic manifold of the pump-purge system contains openings and fluid flow conduits which correspond with openings and fluid flow conduits of the modular, monolithic fluid handling system, to enable evacuation or flushing of a selected fluid flow conduit within the fluid handling system. To avoid the formation of a closed tolerance loop, it is necessary that the pump-purge manifold or a portion of the modular, monolithic fluid handling system manifold to which it is attached be sufficiently free-floating to permit making of all necessary connections without creating stress which can lead to an increased rate of corrosion or failure of the connection. In a preferred embodiment gas handling system, the gas handling flow lines which make up the system are comprised of individual sticks of gas handling elements, each of which is attached to the manifold of the pump-purge system so that it is free-floating.
REFERENCES:
patent: 4168724 (1979-09-01), Graffunder et al.
patent: 5488925 (1996-02-01), Kumada
patent: 5605179 (1997-02-01), Strong, Jr. et al.
patent: 5662143 (1997-09-01), Caughran
Fittro Gary Curtis
Manofsky, Jr. William L.
Applied Materials Inc
Church Shirley L.
Lee Kevin
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