Modular environmental control unit for cleanrooms

Details Modular environmental control unit for cleanrooms Modular environmental control unit for cleanrooms

1997-08-15

1999-10-05

Wayner, William

Refrigeration

Processes

Circulating external gas

62258, 62436, 165 47, 454187, F25D 1706, B01L 104

Patent

active

059606380

ABSTRACT:
This patent discloses a modular environmental control system for small cleanroom enclosures ("mini-enclosures"). Small environmental control units ("ECUs") are mounted on top of individual mini-enclosures, as near as possible to the process tool within the enclosure. Each ECU has the capability of controlling temperature, humidity, and airflow rate delivered into the enclosure. Temperature is adjusted by first cooling the air inside the ECU followed by reheating it to a selected temperature. The cooling capability is not generated by individual ECUs. Instead, a remote fluid cooling unit supplies chilled fluid to each ECU, which is circulated internally to cool the air. The same remote unit services different ECUs at the same time.

REFERENCES:
patent: 5022231 (1991-06-01), Martinez, Jr.
patent: 5069113 (1991-12-01), Martson et al.
patent: 5425503 (1995-06-01), Corso
patent: 5701950 (1997-12-01), Imamura et al.

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