Valves and valve actuation – With correlated flow path – Tank
Patent
1996-02-07
1998-09-29
Lee, Kevin
Valves and valve actuation
With correlated flow path
Tank
251 63, 251 635, F16K 3122
Patent
active
058136568
ABSTRACT:
The present invention provides for an easily replaceable dump valve assembly to drain a tank in a semiconductor bath system. The dump valve assembly has a drain at a bottom of the tank, a cap, a sealing plate and an actuator. The drain has an end with a flange around it. The cap has a base and side, with the side having an inward protrusion so that the cap can be fitted over the drain with the inward protrusion engaging the flange. The cap can be removed from the drain by simply disengaging the protrusion from the flange. The sealing plate has a surface to contact the end of the drain opening to seal the drain. To move the sealing plate, the actuator is connected to the cap and plate. The actuator drives the plate away from the cap base to place the plate surface against the drain end to close the dump valve assembly and drives the plate toward the cap to remove the plate surface from the drain opening to open the dump valve assembly.
REFERENCES:
patent: 5193579 (1993-03-01), Bauer et al.
patent: 5292103 (1994-03-01), West et al.
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