Modular diaphragm pressure sensor with peripherally mounted elec

Details Modular diaphragm pressure sensor with peripherally mounted elec Modular diaphragm pressure sensor with peripherally mounted elec

1995-06-06

1996-06-04

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73727, 73721, 73706, G01L 904

Patent

active

055222676

ABSTRACT:
A modular pressure sensor has a pressure-sensing element, electrical terminals, interconnections, and a support substrate. The pressure-sensing element produces an electrical signal indicative of pressure at local contacts and the interconnections apply the signal to the electrical terminals. The electrical terminals are secured to the substrate and extend along a peripheral surface of the substrate. The modular pressure sensor can mount, with different orientations, to a header to form a pressure transducer.

REFERENCES:
patent: 3800264 (1974-03-01), Kurtz et al.
patent: 4276533 (1981-06-01), Tominaga et al.
patent: 4322980 (1982-04-01), Suzuki et al.
patent: 4399707 (1983-08-01), Wamstad et al.
patent: 4691575 (1987-09-01), Sonderegger et al.
patent: 4763098 (1988-08-01), Glenn et al.
"Ceramic Packaging, Early Ceramic Packaging", Microelectronics Packaging Handbook, Van Nostrand Reinhold, New York, pp. 460-463 and cover pages.

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