Modular article processing machine and method of article handlin

Details Modular article processing machine and method of article handlin Modular article processing machine and method of article handlin

1984-03-09

1989-01-31

Spar, Robert J.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414217, C23C 1400

Patent

active

048012416

ABSTRACT:
Automated article processing, particularly semiconductor wafer processing, is accomplished in a modular article processing machine. The design of the machine allows easy reconfiguration between single and multiple processing station systems. Articles are handled according to a method which easily accommodates the various configurations of the machine and which provides efficient throughput. The machine includes a number of electromechanical and pneumatic systems under the control of at least one microprocessor. Machine state knowledge necessary for startup in the midst of operation, such as following a power interruption, is provided by a mechanical counter indexed at the completion of each stage of operation by the microprocessor controller.

REFERENCES:
patent: 3973665 (1976-08-01), Giammanco
patent: 4293249 (1981-10-01), Whelan
patent: 4402613 (1963-09-01), Daly et al.
patent: 4498832 (1985-02-01), Corville
patent: 4500407 (1985-02-01), Boys et al.
Bidirectional Air Conveyor-Noteware et al., IBM Technical Disclosure Bulletin, vol. 17, No. 8, Jan. 1975.

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