Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate
2001-04-06
2004-08-17
DeBeradinis, Robert (Department: 2836)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Electrical signal parameter measurement system
C307S031000, C702S064000, C702S065000, C324S076110, C324S126000
Reexamination Certificate
active
06778921
ABSTRACT:
BACKGROUND
1. Technical Field
The present invention relates generally to industrial power delivery systems and, more particularly, to an industrial power delivery system having a modular architecture with digital communications links interconnecting the modules.
2. Discussion
Conventional power delivery systems are typically serviced by power supplies which are specifically designed for that particular application. These power supplies, however, lack modularity and flexibility for expansion in order to facilitate design and manufacture. Further, such power supplies do not typically include fault tolerant communications between modules. Further yet, such power supplies have limited redundancy and power handling capability.
With reference to a specific application, material processing such as plasma deposition and sputtering through the utilization of plasmas has been known for many years. These processes require power delivery systems. Such processes generally require generation of either a radio frequency (RF) or high voltage direct current (DC) power signal coupled to a plasma chamber. Generating a power signal generally entails chopping and rectifying relatively high voltages, such as 270 Volts DC. The chopping and rectifying process generates spurious electric and magnetic fields that couple into nearby circuitry resulting in a relatively high electrical noise environment. The spurious fields that couple into data circuitry may cause a degradation in signal quality leading to possible data corruption. High-speed data communication lines are particularly susceptible to signal degradation and data corruption due to the relatively low noise signal amplitudes required for high speed communications.
Thus, it is desirable to provide a power supply which enables design flexibility and scalability for an industrial power delivery system and provides data communications unaffected by the power supply environment.
SUMMARY OF THE INVENTION
This invention is directed to a power generator system including a power module for receiving an electrical energy input and generating an electrical energy output, the power module includes a digital control input. A sensor module monitors the output of the power module. The sensor module includes a digital sensor output and generates a digital sensor signal on the digital sensor output that varies in accordance with the electrical energy output. A control module has a digital measurement input for receiving the sensor signal. The control module determines parameters that vary in accordance with the electrical energy output. The control module includes a digital control output connected to the digital control input. The control module generates a control signal applied to the digital control input for controlling the power module.
This invention is also directed to a power delivery system that receives an input power and generates an output power to a load. The power delivery system includes a power generator which receives the input power and generates the output power. The power generator includes a first digital interface. An impedance matching network is interposed between the power generator and the load. The impedance match network including a second digital interface. An output sensor is disposed in proximity to the load and senses a parameter associated with the power generator output. The output sensor includes a third digital interface and generates a digital sensor signal via the third digital interface that varies in accordance with the sensed parameter. A controller receives the sensor signal and determines a control signal for output to the power generator. The controller includes a fourth digital interface and generates the control signal via the fourth digital interface for communications with the first digital interface. The power generator varies the output power in accordance with the control signal.
For a more complete understanding of the invention, its objects and advantages, reference should be made to the following specification and to the accompanying drawings.
REFERENCES:
patent: 4375051 (1983-02-01), Theall
patent: 5614813 (1997-03-01), Batson
patent: 5831479 (1998-11-01), Leffel et al.
patent: 5867060 (1999-02-01), Burkett, Jr. et al.
patent: WO 00/30148 (2000-05-01), None
Keane Anthony R. A.
Pulhamus, Jr. William R.
Radomski Aaron T.
DeBeradinis Robert
ENI Technology Inc.
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