Modular apparatus for cleaning, coating and curing photoreceptor

Details Modular apparatus for cleaning, coating and curing photoreceptor Modular apparatus for cleaning, coating and curing photoreceptor

1989-12-27

1991-08-13

Simmons, David A.

Coating apparatus

With heat exchange, drying, or non-coating gas or vapor...

118319, 118500, B05C 1100

Patent

active

050387073

ABSTRACT:
An apparatus for processing cylindrical and belt-like substrates includes: a support structure for supporting a planetary array of substrates about a central horizontal axis of the support structure, each substrate defining an offset horizontal axis radially spaced from and parallel to the central horizontal axis of the support structure; an array of processing modules each having a processing chamber for receiving the support structure therein for processing the substrates, each chamber defining a central horizontal axis parallel to the central horizontal axis of the support structure and parallel to the central horizontal axis of an adjacent processing chamber; and a transport vehicle for transporting the support structure in a first direction parallel to the central horizontal axis for insertion into and withdrawal from any one of the processing chambers, in a second direction perpendicular to the central horizontal axis for movement among adjacent processing chambers, and in a third direction perpendicular to the plane of the first and second directions. The array of modules is preferably a multi-level array.

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