Stock material or miscellaneous articles – Hollow or container type article – Polymer or resin containing
Patent
1995-04-17
1997-09-23
Nakarani, D. S.
Stock material or miscellaneous articles
Hollow or container type article
Polymer or resin containing
427237, 427238, 427534, 427536, 427563, 427575, 427579, 428 348, 428 352, 428 353, 428 355, 428 357, 428 3692, 428336, 428446, 428451, B32B 108
Patent
active
056702248
ABSTRACT:
A method of depositing, by microwave plasma enhanced chemical vapor deposition, a modified, silicon oxide, barrier coating atop a temperature sensitive substrate; said barrier coating having barrier properties to at least gaseous oxygen and water vapor. The precursor gaseous mixture includes at least a silicon-hydrogen containing gas, an oxygen containing gas and a gas containing at least one element selected from the group consisting of germanium, tin, phosphorus, and boron. The method requires introducing a sufficient flow rate of oxygen-containing gas into the precursor gaseous mixture to eliminate the inclusion of silicon-hydrogen bonds into the deposited coating. The preferred modifier is germanium. Also, a composite material having a microwave-plasma-enhanced-chemical-vapor-deposited silicon oxide (modified or non-modified) barrier coating. The barrier coating has barrier properties to at least gaseous oxygen and water vapor and is substantially free of Si--H bonds. The barrier coating is deposited by the instant method on a temperature sensitive substrate.
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Dotter, II Buddie R.
Izu Masatsugu
Energy Conversion Devices Inc.
Luddy Marc J.
Nakarani D. S.
Schumaker David W.
Siskind Marvin S.
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