Modified electroplating solution components in a low-acid...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing

Reexamination Certificate

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C205S101000, C205S296000

Reexamination Certificate

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07371311

ABSTRACT:
An embodiment of the invention provides a method for reducing within die thickness variations by modifying the concentration of components of a low-acid electroplating solution. For one embodiment, the leveler concentration is increased sufficiently to reduce within die thickness variations to a specified value. For one embodiment of the invention, the leveler and suppressor are increased to reduce within die thickness variations and substantially reduce a plurality of electroplating defects. In such an embodiment the combined concentration of leveler and suppressor is determined to maintain adequate gap fill.

REFERENCES:
patent: 4913787 (1990-04-01), Kiso
patent: 6808611 (2004-10-01), Sun et al.
patent: 6921551 (2005-07-01), Basol
patent: 6946065 (2005-09-01), Mayer et al.
patent: 2001/0015321 (2001-08-01), Reid et al.
patent: 2002/0112964 (2002-08-01), Gandikota et al.
patent: 2005/0016857 (2005-01-01), Kovarsky et al.
patent: 2006/0081475 (2006-04-01), Barstad et al.
F. A. Lowenheim, Electroplating, McGraw-Hill Book Co. New York, 1978, pp. 201-202.

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