Modified contact for programmable devices

Details Modified contact for programmable devices Modified contact for programmable devices

2005-07-12

2005-07-12

Chaudhari, Chandra (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Bulk effect device

Bulk effect switching in amorphous material

C365S149000

Reexamination Certificate

active

06917052

ABSTRACT:
In an aspect, an apparatus is provided that sets and reprograms the state of programmable devices. In an aspect, a method is provided such that an opening is formed through a dielectric exposing a contact formed on a substrate. The resistivity of the contact is modified by at least one of implanting ions into the contact, depositing a material on the contact, and treating the contact with plasma. In an aspect, a spacer is formed within the opening and programmable material is formed within the opening and on the modified contact. A conductor is formed on the programmable material and the contact transmits to a signal line.

REFERENCES:
patent: 5296716 (1994-03-01), Ovshinsky et al.
patent: 5789758 (1998-08-01), Reinberg
patent: 6031287 (2000-02-01), Harshfield
patent: 6087674 (2000-07-01), Ovshinsky et al.
patent: 6229157 (2001-05-01), Sandhu
patent: 6597009 (2003-07-01), Wicker
patent: 2002/0038872 (2002-04-01), Lowrey et al.

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