Modified chemical vapor deposition using independently controlle

Glass manufacturing – Processes of manufacturing fibers – filaments – or preforms – Process of manufacturing optical fibers – waveguides – or...

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65417, 65423, 65430, 4271632, 427166, 42725535, 42725537, 42725539, C23C 1640

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active

061453455

ABSTRACT:
The deposition rate of MCVD processes is enhanced by applying at least a first and a second independently controlled heat source to a plurality of reactants which are used to form deposited particulate matter. The first heat source is adjusted so as to provide at least a specified rate of reaction for the reactants, and the second source is adjusted so as to provide at least a specified deposition rate for the particulate matter.

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