Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1980-03-07
1981-04-14
Pianalto, Bernard D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 451, 427 47, 427237, 427238, 4273762, B05D 306
Patent
active
042620350
ABSTRACT:
The modified chemical vapor deposition process is practiced using an rf source as the external heat source. An rf plasma is thus established within a glass tube through which appropriate glass precursor vapors are passed. As a result of the ensuing chemical reactions, particulate material is formed within the tube and deposits on it. The hot plasma zone may be used to consolidate this particulate material into a transparent glass, and onto the interior wall of the tube. The tube is subsequently drawn into an optical fiber.
Jaeger Raymond E.
MacChesney John B.
Miller Thomas J.
Bell Telephone Laboratories Incorporated
Dworetsky Samuel H.
Pianalto Bernard D.
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