Modified carrier films to produce more uniformly polished substr

Details Modified carrier films to produce more uniformly polished substr Modified carrier films to produce more uniformly polished substr

1997-10-30

2000-06-13

Scherbel, David A.

Abrading

Work holder

Clamp

451398, 451 41, 451390, B24B 4106

Patent

active

060742887

ABSTRACT:
A substrate holder assembly for forming a substantially uniformly polished substrate surface during chemical-mechanical polishing is described. The substrate holder assembly includes a carrier film having: (A) a porous layer with (i) a first surface with an outwardly protruding dome shaped region that applies pressure on at least a portion of the substrate surface during chemical-mechanical polishing and a location of the protruding dome shape is aligned with a location of an area of substrate surface that is likely to be underpolished, (ii) a second surface facing a contact surface of a backing plate; and (B) a pressure sensitive adhesive backing layer for affixing the carrier film to the contact surface of the backing plate under sufficient pressure.

REFERENCES:
patent: 3886696 (1975-06-01), Bruck
patent: 4459784 (1984-07-01), Hernandez et al.
patent: 4530139 (1985-07-01), Miller
patent: 4918869 (1990-04-01), Kitta
patent: 5036630 (1991-08-01), Kaanta et al.
patent: 5127196 (1992-07-01), Morimoto et al.
patent: 5205076 (1993-04-01), Vernon et al.
patent: 5573448 (1996-11-01), Nakazima et al.
patent: 5645474 (1997-07-01), Kubo et al.
patent: 5695393 (1997-12-01), Granziera
patent: 5766058 (1998-06-01), Lee et al.
patent: 5769692 (1998-06-01), Pasch et al.

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