Modified alginic acid of alginic acid derivatives and...

Details Modified alginic acid of alginic acid derivatives and... Modified alginic acid of alginic acid derivatives and...

2006-03-07

2006-03-07

Hamilton, Cynthia (Department: 1752)

Compositions: coating or plastic

Coating or plastic compositions

Carbohydrate or derivative containing

C536S003000, C430S271100, C525S054300, C525S054200, C516S104000

Reexamination Certificate

active

07008476

ABSTRACT:
Modified alginic acid or alginic acid derivatives and anti-reflective coatings based on thereon are described.

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Form PCT/ISA/210 for PCT/EP2004/005654.
Form PCT/ISA/220 for PCT/EP2004/005654.
Form PCT/ISA/237 for PCT/EP2004/005654.
English language translation of the abstract for JP 54-042478.
English language translation of the abstract for JP 60-219202.
Zhong Xiang et al., “Optimization of Organic Bottom Antireflective Coatings' Compatibility with ArF Resist”, Proceedings of SPIE, vol. 4690, 2002, pp. 1102-1111.
Y.-H. Kang, “Development of bottom antireflective coating for high-resolution KrF lithography”, Proceedings of SPIE, vol. 4690, 2002, pp. 1093-1101.
English language Translation of abstract for JP 60-219202.

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