Modification to a Y-scan monitor circuit

Details Modification to a Y-scan monitor circuit Modification to a Y-scan monitor circuit

1994-08-01

1996-06-18

Wieder, Kenneth A.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324 731, 324 725, 340648, 318365, G01R 3126, B60K 4118

Patent

active

055281648

ABSTRACT:
A supplemental monitoring device which issues an error signal when the monitoring device loses motor drive pulses is disclosed. Also disclosed is providing a manufacturing system with a normally closed relay which controls the flag, thus advantageously providing a semiconductor system which automatically interrupts the ion beam in the event of a system malfunction.

REFERENCES:
patent: 4963808 (1990-10-01), Torisawa et al.
patent: 5089774 (1992-02-01), Nakano

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