Mobile transparent window apparatus and method for photochemical

Coating processes – Electrical product produced – Welding electrode

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118 501, 118620, 118718, 118725, 427 541, B05D 306

Patent

active

042659329

ABSTRACT:
The specification discloses a mobile transparent window apparatus and method for use in a photochemical vapor deposition system having a reaction chamber with a quartz window integral with the top surface thereof, which prevents undesirable deposits on the quartz window and thereby enhances the efficiency and rate of the deposition process. The apparatus comprises: (a) a film of a predetermined material that is drawn across the internal face of the quartz window within the reaction chamber, the predetermined material being characterized by being transparent to a selected wavelength of radiation, being stable at the elevated temperature required for the photochemical vapor deposition, and possessing sufficient mechanical strength to be moved across the quartz window; and (b) means for moving the film across the internal face of the quartz window.

REFERENCES:
patent: 3139352 (1964-06-01), Coyner
patent: 3383238 (1968-05-01), Unzicker et al.
patent: 3620827 (1971-11-01), Collet
patent: 3740257 (1973-06-01), Roscher
patent: 3799792 (1974-03-01), Ryng
patent: 4022928 (1977-05-01), Piwcyzk

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