Mobile charge measurement using corona charge and ultraviolet li

Details Mobile charge measurement using corona charge and ultraviolet li Mobile charge measurement using corona charge and ultraviolet li

1997-08-11

1998-11-10

Brown, Glenn W.

Electricity: measuring and testing

A material property using electrostatic phenomenon

Corona induced

324452, 324753, 324766, G01N 2760, G01R 3126, G01R 31308

Patent

active

058349413

ABSTRACT:
Corona charge is applied to an oxide layer on a semiconductor wafer. Then ultraviolet light is used to erase a grid pattern of the corona charge. Opposite polarity corona charge is then applied to the layer, resulting in a grid of field-induced PN junctions. The surface photovoltage of the junctions is measured over time to provide a measure of the mobile charge in the oxide layer.

REFERENCES:
patent: 3449658 (1969-06-01), Robinson et al.
patent: 4812756 (1989-03-01), Curtis et al.
patent: 5216362 (1993-06-01), Verkuil
patent: 5498974 (1996-03-01), Verkuil et al.
patent: 5661408 (1997-08-01), Kamieniecki et al.

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