Mobile charge immune process

Details Mobile charge immune process Mobile charge immune process

1998-07-21

2000-10-24

Niebling, John F.

Semiconductor device manufacturing: process

Direct application of electrical current

438468, 438787, 324765, H01L 21326

Patent

active

061366692

ABSTRACT:
A semi conductor manufacturing process including uniform negative polarity wafer charging to remove or immobilize alkali ions such that the device becomes immune to their presence. The wafer is charged with a corona discharge at a 1MV/cm-2MV/cm bias field and low temperature (200.degree. C.-300.degree. C.) heating to bring mobile ions to the wafer's surface. Surface mobile ions are removed with a deionized (DI) water rinse or a standard sequential wafer wet cleaning step, immobilized with a normal gate (polysilicon) or metal contact formation step or both, thereby effectively removing mobile ions from the semiconductor structure.

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