Mixed-scale electronic interface

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – With electrical circuit layout

Reexamination Certificate

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C438S280000

Reexamination Certificate

active

07833842

ABSTRACT:
Embodiments of the present invention are directed to mixed-scale electronic interfaces, included in integrated circuits and other electronic devices, that provide for dense electrical interconnection between microscale features of a predominantly microscale or submicroscale layer and nanoscale features of a predominantly nanoscale layer. A method is provided for fabricating a nanoscale/microscale interface having a microscale layer and a predominantly nanoscale layer.

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