Mixed polarization state monitoring

Details Mixed polarization state monitoring Mixed polarization state monitoring

2008-08-11

2011-10-04

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Methods

C355S053000, C355S067000, C355S071000

Reexamination Certificate

active

08031330

ABSTRACT:
Mixed polarization state monitoring is presented. One method may include selecting a set of total dose values, and for each total dose value: exposing a location on a photoresist using illumination having an x-polarization value with an x-exposure dose ratio value of the total dose value, exposing the location on the photoresist using illumination having a y-polarization value with a y-exposure dose ratio value of the total dose value, and repeating the x-polarization value exposing and the y-polarization value exposing to achieve a range of mixed polarization states and a plurality of dose ratio values that range over extremes for the x-polarization exposure and the y-polarization exposure, each repeating occurring at a different location on the photoresist; and monitoring which mixed polarization states causes a change in an image printed at the different locations in the photoresist.

REFERENCES:
patent: 7224458 (2007-05-01), McIntyre et al.
patent: 2006/0250615 (2006-11-01), Fukuhara

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