Mixed-mode IC having an isolator for minimizing cross-talk throu

Details Mixed-mode IC having an isolator for minimizing cross-talk throu Mixed-mode IC having an isolator for minimizing cross-talk throu

1997-06-03

1999-03-30

Hardy, David B.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

257501, 438430, H01L 2712

Patent

active

058893148

ABSTRACT:
A cross-talk source isolator is provided in an integrated circuit which has an impurity diffused substrate of low resistance on which a silicon region is developed. A digital and analog circuits are formed on the silicon region. A trench is formed in the silicon region, in a direction substantially normal to a major surface of the substrate, in a manner to separate said digital and analog circuits. The trench has a bottom portion reaching the substrate and having an inner wall covered with a dielectric material. The trench includes therewithin an electrically conductive member which has a first end portion electrically connected to the substrate. Further, the electrically conductive member has a second end portion, opposite to the first end portion, coupled to an electrode which leads to a reference voltage source such as ground.

REFERENCES:
patent: 4819052 (1989-04-01), Hutter
patent: 4980747 (1990-12-01), Hutter et al.
patent: 5065216 (1991-11-01), Suzuki et al.
patent: 5331198 (1994-07-01), Kanda et al.
patent: 5442223 (1995-08-01), Fujii
patent: 5552626 (1996-09-01), Morikawa
patent: 5675173 (1997-10-01), Kawai et al.
Kuntal Joardar, "A Simple Approach to Modeling Cross-Talk in Integrated Circuits", IEEE Journal of Solid-State Circuits, vol. 29, No. 10, Oct. 1994, pp. 1212-1219.

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