Mitigation of electrostatic discharges during carbon dioxide cle

Details Mitigation of electrostatic discharges during carbon dioxide cle Mitigation of electrostatic discharges during carbon dioxide cle

1995-11-28

2000-08-15

Warden, Jill

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

134 4, 134 6, 134 7, 134 8, 134 18, 134 27, 134 28, 134 33, C03C 2300

Patent

active

061030163

ABSTRACT:
Electrostatic discharges that occur during solid CO.sub.2 cleaning of a substrate (10) can be virtually eliminated by chilling the substrate so that moisture in the atmosphere, in the form of water droplets(30), condense on the substrate surface (14), thereby forming a continuous film of water (28). The water in the film (28) reacts with the solid CO.sub.2 (24) to form carbonic acid that dissociates into free ions that neutralize the charge on the solid CO.sub.2.

REFERENCES:
patent: 4535576 (1985-08-01), Shukla et al.
patent: 5081068 (1992-01-01), Endo et al.
patent: 5147466 (1992-09-01), Ohmori et al.
patent: 5288332 (1994-02-01), Pustilnik et al.
patent: 5354384 (1994-10-01), Sneed et al.
patent: 5409418 (1995-04-01), Krone-Schmidt et al.
G. Carter, "Streaming Potential ESD Shifts during Post Dicing High Pressure Spray Rinse Operations," 1991 EOS/ESD Symposium Proceedings, pp. 50-58.

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